| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluid apparatus unit structure effective in the reduction of foot print or the like by integrating and unifying a plurality of fluid apparatuses. <P>SOLUTION: In a fluid apparatus unit structure having a plurality of fluid apparatuses connected to one another through flow passages integrated in parallel on a base member 10, the base member 10 provided with a plurality of mounting faces 11 for mounting a pure water opening/closing valve 5 is equipped with a pure water circulation supply line 2 which penetrates the base member 10 and is connected in parallel with the pure water opening/closing valve 5 through a pure water branch passage 4. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
