| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To appropriately prevent breakage of a membrane caused by dust collision without damaging characteristics of the membrane in a sensor with a thin film structure for fluid measurement having the membrane. <P>SOLUTION: The sensor with the thin film structure includes the membrane 20 wherein a region of the membrane 20 is divided into a wiring formation region with wiring parts 21, 22 for fluid measurement arranged, and a vacant region with no wiring part arranged. A dummy pattern 40 for reinforcing strength of the membrane 20 is formed in the vacant region. The dummy pattern 40 crosses the membrane 20 in a direction orthogonal to a direction of a flow of a fluid, and is arranged so that both ends of the dummy pattern 40 cross an outer circumferential edge part of the membrane 20 positioned in a direction orthogonal to the direction of the flow of the fluid. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
