| 摘要 |
PROBLEM TO BE SOLVED: To obtain a droplet ejection head which is equipped with a laminated-type pressure generating means capable of being made highly dense, downsized and sufficiently displaced. SOLUTION: A piezoelectric material layer 22, which constitutes a piezoelectric element 20, a positive electrode layer 24A, and a negative electrode layer 24B are laminated along the face direction of a diaphragm 18. In manufacture, the layer 22 of a thin film formed by a deposition method is worked by a semiconductor process (dry etching), and conductive materials, which are alternately provided between the layers 22, are formed as a film by an electroplating method. COPYRIGHT: (C)2007,JPO&INPIT
|
