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发明名称
SINGLE CRYSTAL SILICON SEESAW MOTION MICRO MIRROR ARRAY AND MRTHOD THEREOF
摘要
申请公布号
KR20060033819(A)
申请公布日期
2006.04.20
申请号
KR20040082894
申请日期
2004.10.16
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
MOON, SUNG UK;SHIN, HYUN JOON
分类号
G02B26/08
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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