发明名称 Vapor deposition crucible
摘要 A polishing apparatus includes a polishing jig. The polishing jig includes an elastic balloon member, a fixture, and a fluid supply portion. The fixture airtightly closes the rear opening portion of the balloon member. The fluid supply portion supplies a fluid into a space formed by the fixture and balloon member. The balloon member has a cup shape constructed by a dome portion and a cylinder portion extending backward from the outer periphery of the dome portion. The fixture fixes the opening portion of the cylinder portion of the balloon member.
申请公布号 US2006073770(A1) 申请公布日期 2006.04.06
申请号 US20050284652 申请日期 2005.11.22
申请人 HOYA CORPORATION 发明人 TOYOSHIMA YOSHIAKI;TORIUMI HIDEO;TAGUCHI SHIN-ICHIRO
分类号 B24B7/30;B24B13/02;B24B49/00 主分类号 B24B7/30
代理机构 代理人
主权项
地址