发明名称 |
Vapor deposition crucible |
摘要 |
A polishing apparatus includes a polishing jig. The polishing jig includes an elastic balloon member, a fixture, and a fluid supply portion. The fixture airtightly closes the rear opening portion of the balloon member. The fluid supply portion supplies a fluid into a space formed by the fixture and balloon member. The balloon member has a cup shape constructed by a dome portion and a cylinder portion extending backward from the outer periphery of the dome portion. The fixture fixes the opening portion of the cylinder portion of the balloon member.
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申请公布号 |
US2006073770(A1) |
申请公布日期 |
2006.04.06 |
申请号 |
US20050284652 |
申请日期 |
2005.11.22 |
申请人 |
HOYA CORPORATION |
发明人 |
TOYOSHIMA YOSHIAKI;TORIUMI HIDEO;TAGUCHI SHIN-ICHIRO |
分类号 |
B24B7/30;B24B13/02;B24B49/00 |
主分类号 |
B24B7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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