| 摘要 |
<p>A liquid regulator capable of accurately controlling a flow by developing excellent responsiveness to flow control for not only a variation in primary side pressure but also a variation in secondary side pressure. The liquid regulator (10) comprises a first diaphragm chamber (16) in which an operating pressure by a gas such as air is received by a first diaphragm (14) to develop an adjusting force for valve opening, a second diaphragm chamber (17) in which a variation in the pressure of the liquid led from a secondary side therein is received by a second diaphragm (15) to generate an adjusting force for valve opening, a shaft part (12) axially slid by receiving the adjusting forces generated in the first and second diaphragm chambers (16) and (17), a valve element (13) performing the adjustment of the valve opening by operating integrally with the shaft part (12), a partition wall (11a) shielding the first diaphragm chamber (16) from the second diaphragm chamber (17) so that an interference is not present between the first diaphragm chamber and the second diaphragm chamber, and a bellows (22) cutting off the flow of the fluid between the first and second diaphragm chambers (16) and (17).</p> |
