摘要 |
The invention relates to a gas transmitter ( 1 ) with selective gas permeable surfaces ( 4 ), comprising a support disc ( 3 ), provided with a number of through openings ( 2 ), made from a semiconductor material, a membrane ( 5 ), covering the openings ( 2 ) in the support disc ( 3 ) which forms the selective gas permeable surfaces ( 4 ) and means for controlling the temperature of the membrane ( 5 ). According to the invention, the temperature control means may be simplified whereby the support disc ( 3 ) itself serves as a means for controlling the temperature of the membrane ( 5 ).
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