发明名称 Gas transmitter with selective gas permeable surfaces
摘要 The invention relates to a gas transmitter ( 1 ) with selective gas permeable surfaces ( 4 ), comprising a support disc ( 3 ), provided with a number of through openings ( 2 ), made from a semiconductor material, a membrane ( 5 ), covering the openings ( 2 ) in the support disc ( 3 ) which forms the selective gas permeable surfaces ( 4 ) and means for controlling the temperature of the membrane ( 5 ). According to the invention, the temperature control means may be simplified whereby the support disc ( 3 ) itself serves as a means for controlling the temperature of the membrane ( 5 ).
申请公布号 US2005229786(A1) 申请公布日期 2005.10.20
申请号 US20050497398 申请日期 2005.06.14
申请人 INFICON GMBH 发明人 WETZIG DANIEL
分类号 G01M3/00;G01M3/20;(IPC1-7):B01D53/22 主分类号 G01M3/00
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