INKJET HEAD MANUFACTURING METHOD, INKJET HEAD AND INKJET RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve an insulating property between adjacent first electrodes and reduce side-etched portions when a piezoelectric body layer is patterned by a wet etching method in an inkjet head manufacturing method.

SOLUTION: A first electrode layer 2, a crystal orientation control layer 3, a piezoelectric body layer 4, a second electrode layer 5 and a vibration layer 6 are sequentially formed on one surface of a substrate 1. Subsequently, a pressure chamber member 7 is joined to the vibration layer 6. Subsequently the substrate 1 is removed by etching. Subsequently the first electrode layer 2 and the crystal orientation control layer 3 are patterned by dry etching so as to make them correspond to the positions of the pressure chambers 8. Finally the piezoelectric body layer 4 is patterned by wet etching.

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