SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor structure, a semiconductor device, and a method and apparatus for manufacturing them which can improve the electric characteristic of an active element. SOLUTION: The semiconductor device has a non-single-crystal semiconductor film (14), a supporting substrate (12) for supporting the non-single-crystal semiconductor film (14), and an active element (10) having a portion of the non-single-crystal semiconductor film (14) as its channel region (22). Especially, the channel region (22) has its oxygen and carbon concentration both of which do not exceed 1×1018atoms/cm3. COPYRIGHT: (C)2005,JPO&NCIPI