Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung,申请号DE19986026068-传众专利搜索

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发明名称	Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung
摘要
申请公布号	DE69826068(D1)	申请公布日期	2004.10.14
申请号	DE19986026068	申请日期	1998.06.10
申请人	NORDIKO TECHNICAL SERVICES LTD., LONDON	发明人	PEARSON, DAVID IAN CHARLES;TAN, SWIE-IN
分类号	C23C14/35;H01J37/34;H01L21/203;(IPC1-7):H01J37/34	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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