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发明名称
Electrostatic chuck
摘要
申请公布号
USD490095(S1)
申请公布日期
2004.05.18
申请号
US20030183945F
申请日期
2003.06.20
申请人
NGK SPARK PLUG CO., LTD.
发明人
OKUGAWA KEISUKE
分类号
主分类号
代理机构
代理人
主权项
地址
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