Manufacture of exposed structures using exposure apparatus, by reading macro line data sets for lines being exposed from memory while further macro lines are written to memory

摘要

The method involves exposing a substrate body (28) in the region of a module within a number of macro-lines to form each of a number of identical structures. An exposure apparatus includes a number of light sources which are driven simultaneously by a controller with a memory from which data sets of macro lines being exposed are read while data sets of further macro lines are stored. An Independent claim is included for an apparatus for manufacturing exposed structures.