| 发明名称 |
VORRICHTUNG ZUR TRENNUNG EINES VERBUNDBAUTEILS MIT EINEM FLÜSSIGKEITSSTRAHL |
| 摘要 |
<p>Apparatus is provided to separate a composite member consisting of a plurality of bonded members (1 and 2) without destructing or damaging it, a fluid (7) is jetted against the composite member from a nozzle (8) to separate it into a plurality of members (11 and 12) at a position (3) different from a bonding position (14). The apparatus is provided with a holder for supporting and positioning the composite member, and a jet or jets for jetting fluid against the edge surface of the composite member. <IMAGE></p> |
| 申请公布号 |
AT254802(T) |
申请公布日期 |
2003.12.15 |
| 申请号 |
AT20010202222T |
申请日期 |
1998.03.26 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OHMI, KAZUAKI;YONEHARA, TAKAO;SAKAGUCHI, KIYOFUMI;YANAGITA, KAZUTAKA |
| 分类号 |
H01L21/301;H01L21/00;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/301 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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