| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a wiring circuit board that does not reduce the productivity of etching even if the space of a wiring pattern is small. SOLUTION: In the apparatus for manufacturing the wiring circuit board, an etching resist pattern in a prescribed shape is formed on a conductor layer that is laminated on an insulating layer, and a wiring pattern is formed by chemically etching the conductor layer. The apparatus comprises a plurality of etching tanks 11 and 12 for chemical etching, and etching liquid-eliminating means 21 and 22 that are provided at the rear flow side of each of the etching tanks 11 and 12. COPYRIGHT: (C)2003,JPO
|
