MICRO-ACTUATOR, MICRO-ACTUATOR DEVICE, OPTICAL SWITCH AND OPTICAL SWITCH ARRAY

摘要

A movable plate (21) is fixed to a substrate (11) via flexure units (27a, 27b) and allowed to vertically move with respect to the substrate (11) that doubles as a fixed electrode. The plate (21) has second electrode units (23a, 23b) that generate an electrostatic force between them and the substrate (11) by a voltage between them and the substrate (11), and a current route (25) disposed in a magnetic field to generate a Lorentz force when energized. A mirror (12) moving into or back from an optical path is provided on the plate (21). Accordingly, it is possible to widen the movable range of a movable unit and reduce power consumption without applying a high voltage or restricting downsizing.