SCANNING ELECTRON MICROSCOPE

摘要

A scanning electrode electron microscope for imaging a sample, the microscope comprising a sample chamber containing a gas in which the sample is positioned in use. A bias member is maintained at a predetermined electrical potential so as to accelerate electrons emitted from the sample. A detection system generates the image of the sample. The detection system comprises an ion collector positioned between the sample and the bias member, the ion collector being maintained at a potential below the predetermined electrical potential to thereby collect the ions from the region between the sample and the bias member; a sensor coupled to the ion collector for determining the member of ions collected thereon; and, a processing system responsive to the sensor to generate an image of the sample.