| 摘要 |
A method of forming an ink jet printhead with an integral ink filter is provided. The ink jet printhead has decreased flow resistance by formation of two filter array portions. A set of parallel openings are anisotropically etched in a surface of a first substrate to form a first filter array portion. A second substrate having an insulating layer therein is patterned to expose a set of openings forming a second filter array portion. The first and second portions are between an integral ink chamber and ink nozzles so that ink can be filtered through at least one of the first and second filter array portions.
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