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发明名称
Apparatus and method for cleaning semiconductor wafers
摘要
申请公布号
EP0740329(A8)
申请公布日期
2001.08.29
申请号
EP19960106416
申请日期
1996.04.24
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED;PRE-TECH CO., LTD
发明人
NETSU, SHIGEYOSHI;HARADA, YASUYUKI
分类号
B08B3/10;C02F1/36;C02F1/461;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/00
主分类号
B08B3/10
代理机构
代理人
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