发明名称 PRODUCTION OF NOZZLE PLATE
摘要 PROBLEM TO BE SOLVED: To provide a nozzle plate producing method capable of easily forming a nozzle orifice with high accuracy. SOLUTION: A nozzle orifice 13 can be easily formed by a process for forming an electroforming seed electrode 11 having an opening part 15 having a diameter larger than the nozzle diameter being the diameter of the straight part of the nozzle orifice 13 to the region to which the nozzle orifice 13 is formed on an insulating substrate 110, a process for forming a columnar resist 16 on the insulating substrate 110 within the opening part 15 so as to make the same higher than the length of the straight part of the nozzle orifice 13, a process for forming a nozzle substrate 12 on the insulating substrate 110 and the electroforming seed electrode 11 by electroforming and a process for removing the columnar resist 16 and the insulating substrate 110.
申请公布号 JP2001038915(A) 申请公布日期 2001.02.13
申请号 JP19990218939 申请日期 1999.08.02
申请人 SEIKO EPSON CORP 发明人 SHIMADA KATSUTO
分类号 B41J2/135;(IPC1-7):B41J2/135 主分类号 B41J2/135
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