| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the softening of a substrate near an electron emission part and the deformation of the electron emission part, thereby by setting the softening point of the surface coat layer of the substrate having a number of electron emitting elements arranged thereon and having a pair of element electrodes and a conductive thin film, having the electron emission part higher than the softening point of a base body. SOLUTION: A base body 1 of this electron source substrate is inexpensive and is desirably formed of soda lime glass because. A surface coat layer 9 has the role of making it difficult to conduct the heat in the current carrying to an electron emitting element to the base body 1, and borosilicate glass, zinc borosilicate glass, or alumino borosilicate glass is used therefor. A surface conductive type electron emitting element is desirably used as the electron emitting element. A deposit composed mainly of carbon or a carbon compound and a thin film which is mainly composed of Pd or PdO are desirably used as an electron emission part 5 and a conductive thin film 4, respectively. A plurality of electron emitting elements are arranged in parallel on a substrate, and element electrodes are connected to mutually insulated X-direction and Y-direction metal wirings.</p> |
