| 摘要 |
A primary electron beam applied to a thinned sample excites Auger electrons on a surface of the thinned sample, and most of the primary electron beam is transmitted by the thinned sample, scattering and reflection are restrained and an Auger electron generation area is micrified. A primary electron beam transmitted by the thinned sample passes through a hole and is directed to a Faraday cup disposed immediately below the sample. The primary electron beam entering the Faraday cup is scattered and reflected within the Faraday cup and effectively absorbed and captured by the Faraday cup. By maintaining the potential of the Faraday cup at a ground potential during the analysis, stable data are obtained.
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