Method of manufacturing vacuum hermetic vessels

摘要

Method for forming a vacuum hermetic vessel. Plural exhaust holes are formed in the first main substrate at a number of positions. A second main substrate is superposed over the first main substrate. The two substrates are hermetically sealed. The two substrates are cut at predetermined positions to form individual vessels. Lead-out electrodes are formed on both the first and second substrates and are not covered by another substrate. The vessels are evacuated and sealed using exhaust tubes.