SUBSTRATE RECOGNITION DEVICE,申请号JP19980089124-传众专利搜索

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发明名称	SUBSTRATE RECOGNITION DEVICE
摘要
申请公布号	JPH11288974(A)	申请公布日期	1999.10.19
申请号	JP19980089124	申请日期	1998.04.02
申请人	HITACHI CHEM CO LTD	发明人	KOIDE NOBUKAZU;GOTO YASUSHI
分类号	H01L21/60;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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