| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously perform palpation on an object to be measured and the measurement of the degree of hardness, and at the same time, minimize the measurement error. SOLUTION: This hardness sensor consists of a main body A composed of a piezoelectric ceramic, the surface treated to form an electrode of which is formed into a circular and electostriction-type ultrasonic vibrator 1 vibrating radially. In addition, a disc-shaped common electrode 3 comprising a conductor is interposed between the ultrasonic vibrator 1 and a circular detection vibrator 2 which detects the vibration of the ultrasonic vibrator 1, and the ultrasonic vibrator 1, the detection vibrator 2 and the common electrode 3 are integrally stacked in the center axial direction. Further, a contact element 4 which comes into contact with an object M is junctioned to the common electrode 3. |
