| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sage device for preventing the positioning error of a photosensitive substrate and the overlapping failure of an exposure pattern by judging the failure in acceleration at an initial stage in the device using a simple configuration. SOLUTION: An acceleration detector 6 is provided on a stage 11 and the acceleration when a stage is being moved is constantly detected. A detection result by the acceleration detector is compared with an acceleration (allowable acceleration) which is a reference, and an alarm is given when the allowable acceleration is exceeded.</p> |
