| 摘要 |
PURPOSE: To form a structure of several to several tens of nanometer in size which is necessary for a high density device, by the assembling from atoms and molecules, by forming a pattern on a substrate, by using phase separation of a multicomponent polymer. CONSTITUTION: A multicomponent polymer is supplied on a substrate 8, and a pattern 2 is formed on the substrate 8 by using the phase separation of the polymer. The pattern 2 may be formed by using the components of the multicomponent polymer itself which is supplied on the substrate and phase- separated. In another case, after the multicomponent polymer is supplied on the substrate 8, the polymer is phase isolated, and pattern material substance which selectively combines with specific kinds of components is bonded, and the pattern is formed by using the pattern material substance. The pattern is used as it is or transfered, and surface working is performed. Thereby a large number of fine patterns of nanometer level can be formed. |
