| 摘要 |
<p>PURPOSE:To obtain a ceramic heater free from decreased chucking power due to warp and from exfoliation at a joined part and having a strong chucking power and a long lifetime, by a method wherein a difference between linear expansion coefficients of two adjacent layers out of a support base, an electrode for an electrostatic chuck, a heating layer and a covering layer is made a specified value or below. CONSTITUTION:An electrode for an electrostatic chuck constituted of conductive ceramic is joined on the surface of a support base constituted of electrically insulative ceramic, while a heating layer constituted of the conductive ceramic is joined on the rear, and a covering layer constituted of the conductive ceramic is provided on them. In a ceramic heater with the electrostatic chuck constructed in this way, a difference between linear expansion coefficients of the support base and the electrode for the electrostatic chuck, a difference between the linear expansion coefficients of the support base and the heating layer, a difference between the linear expansion coefficients of the electrode for the electrostatic chuck and the covering layer and a difference between the linear expansion coefficients of the heating layer and the covering layer are all made 1X10<-6>/ deg.C or below. The support base and the covering layer are made constituted of a boron nitride, a mixture of the boron nitride and an aluminum nitride or a silicon nitride, for instance.</p> |
