Process for supplying a gas, especially of diborane and silane

摘要

A process for supplying a gas to a reactor comprising the steps of: (i) continuously measuring density of the gas, the gas including at least one component which is susceptible to formation of an undesired side product as shown by a variation in density of the gas; and (ii) modifying feed conditions of the gas if formation of the undesired side product is shown by a variation in the density of the gas. The process can be employed to continuously monitor the content of diborane (B2H6) in a mixture with silane (SiH4) in a process for producing a borophosphosilicate glass. An apparatus for supplying a gas to a reactor is also disclosed.