| 摘要 |
PURPOSE:To obtain high-intensity carbon molecular beams with a low electric current value by aligning the electric current through the heating part of a filament in the direction of c axis of a graphite crystal in a carbon molecular beam source cell equipped with a graphite filament. CONSTITUTION:The heating part 1 of a filament 10 is made of pyrolytic graphite and electric current is allowed to flow in the direction of c axis of the graphite crystal. Further, a wiring unit 2 made of pyrolytic graphite is connected to the heating part 1 and the wiring unit 2 is electrically charged in the direction perpendicular to c axis of the graphite crystal. The resistance of the filament 10, therefore, can be made higher by utilizing a high resistivity in the direction of c axis of the graphite crystal since electric current through the heating part 1 of the filament 10 is aligned in the direction of c axis of the graphite crystal. In addition, the wiring unit 2 has a low resistivity because of the electric current flowing in the direction perpendicular to the c axis and consumption of the wiring unit 2 due to evaporation of carbon has not a remarkable effect on change of the resistivity of the filament. Accordingly, the intensity of the produced molecular beams is stable. |
