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发明名称
摘要
申请公布号
JPH0752305(B2)
申请公布日期
1995.06.05
申请号
JP19850277003
申请日期
1985.12.11
申请人
发明人
分类号
G03G5/08;C23C16/24;C23C16/30;G03G5/082;(IPC1-7):G03G5/08
主分类号
G03G5/08
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