| 摘要 |
PURPOSE:To serve a cold wall face as an adsorbing face by previously solidifying a gas, which solidifies at a cooling temperature, in a low temperature trap containing a filler. CONSTITUTION:Liquid nitrogen is contained in a liquid nitrogen tank 5 prior to operation of KrF laser thus cooling a liquid nitrogen cooling trap 1 down to the temperature of liquid nitrogen and then Xe is introduced from an Xe source 8 into the cooling trap 1. Xe gas is solidified on the surface of filler 2 cooled down to the temperature of liquid nitrogen. The Xe source 8 is then uncoupled from a gas introduction pipe 3 and a gas medium supply pipe 7 is coupled with the gas introduction pipe 3 in order to introduce a laser soluble gas medium from the laser tube 3 into the cooling trap 1. Discharge is then started in the laser tube and laser gas medium is circulated through the cooling trap 1 while sustaining laser oscillation. The filler 2 in the cooling trap 1 forms a trap face cooled at the temperature of liquid nitrogen while furthermore functions as an adsorbing face because of the solidified Xe. |
