APPEARANCE INSPECTION MICROSCOPTIC DEVICE,申请号JP19920138983-传众专利搜索

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发明名称	APPEARANCE INSPECTION MICROSCOPTIC DEVICE
摘要
申请公布号	JPH05333270(A)	申请公布日期	1993.12.17
申请号	JP19920138983	申请日期	1992.05.29
申请人	NIKON CORP;NEC YAMAGUCHI LTD	发明人	TAZAWA HISASHI;HONMA SOUTA;KAWAI AKITOSHI;YAMASHITA OSAMU;INOUE AKIHIKO;KATO MINORU
分类号	G02B21/00;(IPC1-7):G02B21/00	主分类号	G02B21/00
代理机构		代理人
主权项
地址

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