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发明名称
MANUFACTURE OF THIN FILM
摘要
申请公布号
JPH05230641(A)
申请公布日期
1993.09.07
申请号
JP19920069216
申请日期
1992.02.18
申请人
SHIN ETSU CHEM CO LTD
发明人
EJIMA MASAKI;FUKUDA KUNIO;YOSHIDA IKUO;YAMAMURA KAZUICHI;SAKAGUCHI ARATA;TAWARA YOSHIO
分类号
C23C16/50;C23C14/00;C23C14/34;C23F4/00
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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