| 摘要 |
PURPOSE:To facilitate the positioning of a measurement position and obtain a clear optical microscope image without requiring professional knowledge by forming a specific optical displacement detecting means. CONSTITUTION:A sensor head 8 is constituted of a mirror 82, the first half mirror 84, the second half mirror 85, a reflection objective lens 86, the third half mirror 87, a CCD camera 88, and a photo-diode 89. The white light 83 is radiated from a white light source, and the sensor head 8 is vertically moved by a sensor head vertical movement system to focus an optical microscope image on a sample 6. The sample 6 is horizontally moved to the measurement position by an XY rough movement system in the focused state. The measurement position on the sample 6 is positioned. The positioning of the measurement position can be easily performed, and a clear optical microscope image can be obtained without requiring professional knowledge.
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