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发明名称
PATTERN FORMING
摘要
申请公布号
JPH02150015(A)
申请公布日期
1990.06.08
申请号
JP19880304615
申请日期
1988.12.01
申请人
FUJITSU LTD
发明人
KOSEMURA KINSHIRO;KOBAYASHI MASAHIRO
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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