| 摘要 |
PURPOSE:To observe the machined part of a cross section in real time by performing the machining of the cross section and observation of the machined part of the cross section with independent projecting systems. CONSTITUTION:An ion beam projecting system and an electron-beam projecting system are arranged at 90 degrees or at an angle narrower than 90 degrees to each other. Both systems are mounted in the same specimen chamber so that the same point on a spacimen 7 is scanned and illuminated with the ion beam and the electron beam. A beam switching device 13 alternately switches the ion beam and the electron beam. An image display device 14 displays the output of a detector 6 in response to the switching operation of the switch 13. The surface image of the specimen is displayed on an area 16, and the machined image of a cross section is displayed on an area 15. A groove is machined in the specimen 7 by projecting the ion beam, and the cross-sectional part crossing a contact hole part is exposed. The ion beam is switched to electron beam in the oblique projecting direction, and the image is observed. In this way, the observation can be performed only by switching the projecting system immediately as required even in machining the cross-sectional shape. |
