| 摘要 |
<p>Air cushion conveying device with magnetic guidance, comprising a track (12) provided with air-jet ducts opening obliquely in a longitudinal direction on its upper face, permitting the longitudinal displacement of a disc (30) without contact with the track (12). The track supports a first magnetic guidance device (34) running on its upper face. The disc (30) is provided, on its face opposite the track (12), with a second magnetic device facing the first magnetic guidance device (34).
<??>Application to the conveying of silicon wafers in an ultra-clean environment.
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