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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH01120848(A)
申请公布日期
1989.05.12
申请号
JP19870279653
申请日期
1987.11.05
申请人
SEIKO EPSON CORP
发明人
NAKATANI HIROSHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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