| 摘要 |
PURPOSE:To omit a lens and a special deflecting device and to obtain a semiconductor laser characterized by a compact and light weight configuration and very easy positioning and the like to an equipment to be used, by providing a chirping type grating coupler for converging laser light, which is emitted from a part or the entire surface of a light emitting surface, in a space, and providing light emitting and condensing functions in a semiconductor element itself. CONSTITUTION:Light is emitted from a plane, which is formed by the major axis direction of a laser resonator and the direction of the width of the resonator. In this semiconductor laser, a chirping type grating coupler 9 for converging laser light 7, which is emitted from a part of or the entire surface of the light emitting surface, is provided. The period of the grating coupler 9 in the Z direction and the curvature of a grating line can be designed so that the light is converted at one point of the outer space in correspondence with the distribution of the incident laser light. The current injection in the forward direction and the refractive index beneath an electrode in a reverse bias field are controlled with a control electrode 10. Thus the propagating constants of the guided light can be change, and the emitting angle of the output beam can be deflected in the X-Z plane. The wave front of the diverging light from a laser region 100 is converted into a parallel light beam or a converging light beam, and the beam can be extracted to the outside.
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