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发明名称
摘要
申请公布号
DE2853427(C2)
申请公布日期
1988.06.23
申请号
DE19782853427
申请日期
1978.12.11
申请人
RCA CORP., NEW YORK, N.Y., US
发明人
KLEINKNECHT, HANS PETER, BERGDIETIKON, CH;BOSENBERG, WOLFRAM ARNULF, MONMOUTH JUNCTION, N.J., US
分类号
G01B11/02;G03F7/20;(IPC1-7):H01L21/66;G01B9/00
主分类号
G01B11/02
代理机构
代理人
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