| 摘要 |
PURPOSE:To provide a system having excellent light focusing in a short wavelength laser by providing an excimer laser amplifier which inputs harmonic lights passed through a wavelength converter for converting the wavelength of a colorant laser light as for amplifying, and an optical system for focusing an emitted light. CONSTITUTION:A high output light L3 is emitted in oscillating beam width equivalent to a colorant laser L1 from an amplifier 2. When the light L3 is focused by an optical system 4 such as spherical lens or nonspherical lens having small spherical aberration and emitted to copper or other metal 33 of a short wavelength converter 5, a fine spot of 10w/cm<2> or more of energy density is formed on the surface. A plasma is generated on the surface of the metal target 33 by the emission of the fine spot of the high energy density to generate an X-ray 34 of high conversion efficiency. |
