发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To increase the reflectivity of an electrode, and to facilitate laser processing of the electrode by disposing metals mainly comprising chromium, to which copper or silver is added, onto a substrate, scribing a conductive film consisting of the metals by laser beams and forming the electrode. CONSTITUTION:A conductive film 2 in which a metallic film 25 composed of a chromium alloy, to which 0.1-50wt% copper or silver is added, is formed is shaped onto the upper surface of a blexible substrate 1 consisting of an insulated and surface-treated metallic foil. A light-transmitting conductive film is formed on the conductive film 2. Consequently, the reflectivity of the surface is improved remarkably. When copper or silver is added by 0.1wt% or less, reflectivity is not enhanced; however, when it is added by 51wt% or more, laser processability is deteriorated. laser beams are projected from the upper side of the substrate, bored grooves 13 for scribing lines are shaped by the scanning of laser beams, and electrodes 37 are manufactured to each inter-element region 31, 11. Since the film 2 has sublimability and small thermal conductivity, laser processability is facilitated.
申请公布号 JPS60227485(A) 申请公布日期 1985.11.12
申请号 JP19840084266 申请日期 1984.04.26
申请人 HANDOUTAI ENERUGII KENKYUSHO:KK 发明人 YAMAZAKI SHIYUNPEI
分类号 H01L31/04;H01L21/205;H01L27/142;H01L31/052 主分类号 H01L31/04
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