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发明名称
摘要
申请公布号	FR2402297(B1)	申请公布日期	1984.02.10
申请号	FR19780025256	申请日期	1978.09.01
申请人	BALZERS AG HOCHVAKUUMTECHNIK	发明人
分类号	H01J1/148;H01J1/15;(IPC1-7):H01J1/20;H01J37/06	主分类号	H01J1/148
代理机构		代理人
主权项
地址

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