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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPS5779621(A)
申请公布日期
1982.05.18
申请号
JP19800156086
申请日期
1980.11.05
申请人
MITSUBISHI DENKI KK
发明人
ABE HARUHIKO;HARADA HIROJI;DENDA MASAHIKO;NAGASAWA KOUICHI;KOUNO YOSHIO
分类号
H01L21/31;C23C8/36;C23C16/513;C23F1/00;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/30
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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