发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 <p>PURPOSE:To keep minority carriers away from PN junction face and improve an SN ratio by providing an impurity concentration gradient on the electron beam radiation side of the P type and N type semiconductor layer forming an electron beam input output type semiconductor novolatile memory.</p>
申请公布号 JPS52155076(A) 申请公布日期 1977.12.23
申请号 JP19760072544 申请日期 1976.06.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 MATSUKAWA TAKAYUKI;KOYAMA HIROSHI;KAWAZU SATORU;AKASAKA YOUICHI
分类号 H01L27/10;G11C11/34;G11C17/00;H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L27/10
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