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发明名称
Semiconductor device and manufacture thereof
摘要
申请公布号
KR100758835(B1)
申请公布日期
2007.09.19
申请号
KR20017012131
申请日期
2001.09.24
申请人
发明人
分类号
H01L21/314
主分类号
H01L21/314
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代理人
主权项
地址
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