SEMICONDUCTOR THIN FILM MANUFACTURING DEVICE,申请号JP19880286172-传众专利搜索

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发明名称	SEMICONDUCTOR THIN FILM MANUFACTURING DEVICE
摘要
申请公布号	JPH02132821(A)	申请公布日期	1990.05.22
申请号	JP19880286172	申请日期	1988.11.11
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	YOSHIOKA TATSUO;MIYATA YUTAKA
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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