PLASMA LIGHT SOURCE, DETECTING APPARATUS COMPRISING THE SAME LIGHT SOURCE, AND METHOD FOR GENERATING PLASMA LIGHT

摘要

In the present invention, provided are a plasma light source easy for a plasma ignition, capable of maximizing the intensity of plasma and materializing a light source of high brightness by effectively concentrating the generated plasma light and outputting the concentrated light, an inspection device prepared with the plasma light source, and a method for generating a plasma light. The plasma light source includes: a chamber for accommodating a medium material for ignition, igniting plasma by an ignition source, and maintaining the plasma by the irradiation of a laser; and a dual hybrid mirror for reflecting the laser and plasma light emitted from the chamber, by having a first hybrid curved mirror and another hybrid curved mirror which face each other. Wherein, the first and another hybrid curved mirrors have different coatings on the inside and outside.