Particle Analysis Instrument and Computer Program

摘要

A particle analysis instrument is offered which can make a measurement in a shorter time than heretofore. The particle analysis instrument (100) is used to analyze a sample (S) containing plural particles by measuring the sample over plural fields of view. The instrument (100) includes a measuring section (10) for scanning primary rays (EB) over the sample (S) and detecting a signal emanating from the sample (S), a particle area totalizing portion (222) for finding the area of particles for each field of view from the results of the measurement made by the measuring section (10) and summing up such areas of particles for all of the fields of view to find a total area of particles, and a decision portion (226) for making a decision as to whether the measurement process should be ended, based on the ratio of the total area of particles to an area of the sample (S) measured to obtain the total area of particles.

主权项

1. A particle analysis instrument for analyzing a sample containing a plurality of particles by measuring the sample across a plurality of fields of view, said particle analysis instrument comprising:
a measuring section for scanning primary rays over the sample and detecting a signal emanating from the sample; a particle area totalizing portion for finding a particle area for each of the fields of view from results of measurements performed by the measuring section and summing up such particle areas for all of the fields of view to find a total area of particles; and a decision portion for making a decision as to whether the measurement process should be ended, based on the ratio of the total area of particles to an area of the sample measured to obtain the total area of particles.