发明名称 ナノ構造アレイの形成方法
摘要 Methods for forming or patterning nanostructure arrays are provided. The methods involve formation of arrays on coatings comprising nanostructure association groups, formation of arrays in spin-on-dielectrics, solvent annealing after nanostructure deposition, patterning using resist, and/or use of devices that facilitate array formation. Related devices for forming nanostructure arrays are also provided, as are devices including nanostructure arrays (e.g., memory devices).
申请公布号 JP5710668(B2) 申请公布日期 2015.04.30
申请号 JP20130036437 申请日期 2013.02.26
申请人 发明人
分类号 H01L29/06;B82Y20/00;B82Y40/00;H01L21/28;H01L21/82;H01L27/10;H01L29/739 主分类号 H01L29/06
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